Soft-X-Ray Projection Imaging with a 1/1 Ring-field Optic

    Authors

    A. A. Macdowell; J. E. Bjorkholm; K. Early; R. R. Freeman; M. D. Himel; P. P. Mulgrew; L. H. Szeto; D. W. Taylor; D. M. Tennant; O. R. Wood; J. Bokor; L. Eichner; T. E. Jewell; W. K. Waskiewicz; D. L. White; D. L. Windt; R. M. Dsouza; W. T. Silfvast;F. Zernike

    Comments

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    Keywords

    Features; system; Optics

    Abstract

    A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-mum features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 mum, probably because of the presence of substrate figuring errors.

    Journal Title

    Applied Optics

    Volume

    32

    Issue/Number

    34

    Publication Date

    1-1-1993

    Document Type

    Article

    WOS Identifier

    WOS:A1993MM44500030

    ISSN

    0003-6935

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