Title
Introduction To Special Issue Of Applied Optics On Soft-X-Ray Projection Lithography
Abbreviated Journal Title
Appl. Optics
Keywords
Optics
Abstract
This special issue contains a collection of papers describing results that were presented at the Second Topical Meeting on Soft-X-Ray Projection Lithography sponsored by the Optical Society of America and held 6-8 April 1992 in Monterey, California, along with several additional papers submitted after that meeting. These papers are being published in this collection to make them readily available to a larger audience than would normally occur with a proceedings and also to take advantage of the critical review process.
Journal Title
Applied Optics
Volume
32
Issue/Number
34
Publication Date
1-1-1993
Document Type
Article
Language
English
First Page
6895
Last Page
6896
WOS Identifier
ISSN
0003-6935
Recommended Citation
"Introduction To Special Issue Of Applied Optics On Soft-X-Ray Projection Lithography" (1993). Faculty Bibliography 1990s. 913.
https://stars.library.ucf.edu/facultybib1990/913
Comments
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