Abbreviated Journal Title
J. Vac. Sci. Technol. B
Keywords
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
Journal Title
Journal of Vacuum Science & Technology B
Volume
26
Issue/Number
5
Publication Date
1-1-2008
Document Type
Editorial Material
DOI Link
Language
English
First Page
1821
Last Page
1823
WOS Identifier
ISSN
1071-1023
Recommended Citation
Tharp, J. S.; Shelton, D. J.; Wadsworth, S. L.; and Boreman, G. D., "Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate" (2008). Faculty Bibliography 2000s. 1055.
https://stars.library.ucf.edu/facultybib2000/1055
COinS
Comments
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