Pitchfork beam shaping for laser micorvia drilling

    Authors

    C. Zhang; N. R. Quick;A. Kar

    Comments

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    Abbreviated Journal Title

    J. Phys. D-Appl. Phys.

    Keywords

    SYSTEM; DESIGN; Physics, Applied

    Abstract

    Laser beam shaping allows redistribution of laser power and phase across the cross-section of the beam for drilling perfectly cylindrical holes. The main purpose of this paper is to show that pitchfork beams improve the microvia quality significantly. An optical system, which comprises three lenses, is designed using conventional diffraction analysis and ray tracing technique to transform a Gaussian beam into a pitchfork beam. The first two lenses are the phase elements through which a Gaussian laser beam is transformed into a super Gaussian beam. The ray tracing technique of geometrical optics is used to design these phase elements. The third lens is the transform element which produces a pitchfork profile at the focal plane due to the diffraction effect. Another aspect of this paper is to demonstrate a pinhole scanning power meter to measure the laser beam profile at the focal plane where the irradiance is very high. This measurement technique is used to verify the existence of the pitchfork beam at the high irradiance plane.

    Journal Title

    Journal of Physics D-Applied Physics

    Volume

    41

    Issue/Number

    12

    Publication Date

    1-1-2008

    Document Type

    Article

    Language

    English

    First Page

    7

    WOS Identifier

    WOS:000256568000016

    ISSN

    0022-3727

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