Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films

    Authors

    H. J. Choi; H. T. Bae; M. J. McNallan; Y. H. Sohn;D. S. Lim

    Comments

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    Abbreviated Journal Title

    Surf. Coat. Technol.

    Keywords

    Silicon carbide; Chlorination; Graphitization; Nanoindentation; Plasticity; SEAL FACE MATERIALS; DRY LINE CONTACT; TRIBOLOGICAL BEHAVIOR; TITANIUM; CARBIDE; CERAMICS; HARDNESS; DIAMOND; NANOINDENTATION; CHLORINATION; MODULUS; Materials Science, Coatings & Films; Physics, Applied

    Abstract

    In this study, the effect of hydrogen on the structure and mechanical properties of carbon films produced by selective etching of monolithic SiC was examined. The process to produce carbon films from SiC (i.e., SiC-derived carbon, CDC) was carried out in a gas mixture of Cl(2) and H(2) at 1000 degrees C for 20 h. The Raman intensity ratio, I(D)/I(G), where subscripts D and G refer to diamond and graphite, decreased as the hydrogen concentration in the gas mixture increased, indicating a decrease in the sp(2) carbon cluster. XRD analysis also showed that the fraction of graphitization decreased as the hydrogen concentration increased. The addition of hydrogen that prevented the formation of graphite (sp(2) bonding) also resulted in a reduction in the film thickness. The hardness and elastic modulus of the carbon films tended to decrease as the H(2) content increased owing to the contribution from the C-H bond and the nano-size pore. (C) 2009 Elsevier B.V. All rights reserved.

    Journal Title

    Surface & Coatings Technology

    Volume

    204

    Issue/Number

    6-7

    Publication Date

    1-1-2009

    Document Type

    Article; Proceedings Paper

    Language

    English

    First Page

    1018

    Last Page

    1021

    WOS Identifier

    WOS:000272859500053

    ISSN

    0257-8972

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