Nanostructured zinc oxide films synthesized by successive chemical solution deposition for gas sensor applications

    Authors

    O. Lupan; L. Chow; S. Shishiyanu; E. Monaico; T. Shishiyanu; V. Sontea; B. R. Cuenya; A. Naitabdi; S. Park;A. Schulte

    Comments

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    Abstract

    Nanostructured ZnO thin films have been deposited using a successive chemical solution deposition method. The structural, morphological, electrical and sensing properties of the films were studied for different concentrations of Al-dopant and were analyzed as a function of rapid photothermal processing temperatures. The films were investigated by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray photoelectron and micro-Raman spectroscopy. Electrical and gas sensitivity measurements were conducted as well. The average grain size is 240 and 224 A for undoped ZnO and Al-doped ZnO films, respectively. We demonstrate that rapid photothermal processing is an efficient method for improving the quality of nanostructured ZnO films. Nanostructured ZnO films doped with Al showed a higher sensitivity to carbon dioxide than undoped ZnO films. The correlations between material compositions, microstructures of the films and the properties of the gas sensors are discussed. (C) 2008 Elsevier Ltd. All rights reserved.

    Journal Title

    Materials Research Bulletin

    Volume

    44

    Issue/Number

    1

    Publication Date

    1-1-2009

    Document Type

    Article

    First Page

    63

    Last Page

    69

    WOS Identifier

    WOS:000262073100013

    ISSN

    0025-5408

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