A < 100 > direction front-etched membrane structure for a micro-bolometer

    Authors

    T. Y. Ma; Y. D. Liu;T. Li

    Comments

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    Abstract

    In this work, a CMOS-compatible membrane-supported micro-bolometer with a front-etched design along the < 110 > direction is fabricated. The openings in the absorbing area make etching faster on (100) planes and form a perfect suspending structure. The experiment shows that the design of < 100 > -oriented windows in an IR absorbing area together with a thermal sensitive thin film results in short releasing time and good IR absorption. The typical measured responsivity and detectivity of such a bolometer are 8.685 x 10(3) V W(-1) and 2.451 x 10(8) cm Hz(1/2) W(-1), respectively. The easy and fast fabrication design makes this structure very suitable for low cost, high performance applications.

    Journal Title

    Journal of Micromechanics and Microengineering

    Volume

    19

    Issue/Number

    3

    Publication Date

    1-1-2009

    Document Type

    Article

    WOS Identifier

    WOS:000263678200023

    ISSN

    0960-1317

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