Microlens fabrication using an etched glass master

    Authors

    P. Zhang; G. Londe; J. Sung; E. Johnson; M. Lee;H. J. Cho

    Comments

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    Abbreviated Journal Title

    Microsyst. Technol.

    Keywords

    Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied

    Abstract

    This paper presents a micromachining technique to fabricate microlenses using an etched glass master. The isotropic etching profile of the glass master was utilized for microlens replication. The master was treated by C4F8 plasma to form a conformal anti-adhesion layer. Lens arrays were replicated on polymer substrates by hot embossing. Microlenses with a large numerical aperture could be fabricated with this method. This work facilitates and simplifies fabrication steps for microlenses.

    Journal Title

    Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems

    Volume

    13

    Issue/Number

    3-4

    Publication Date

    1-1-2007

    Document Type

    Article; Proceedings Paper

    Language

    English

    First Page

    339

    Last Page

    342

    WOS Identifier

    WOS:000243048500022

    ISSN

    0946-7076

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