Abbreviated Journal Title
Appl. Phys. Lett.
Keywords
SCANNING PROBE MICROSCOPY; ELECTRIC-FIELD; DEVICE CREATION; ION; MOBILITY; SEMICONDUCTORS; TEMPERATURE; CUINSE2; BEHAVIOR; SI; LI; Physics, Applied
Abstract
An external electric field (up to 10(6) V/cm) was used for nanoscale p-n junction fabrication in Si doped with Li (Si:Li) in situ in a scanning probe microscope. Creation of nano-p-n junctions was ascribed to the thermally assisted electromigration of Li+ ions. Tunneling I-V spectroscopy provided evidence for a conversion of the electrical conductivity type from p to n. A local temperature increase during an electric field-induced p-n junction fabrication was estimated to be up to 160 degreesC.
Journal Title
Applied Physics Letters
Volume
78
Issue/Number
11
Publication Date
1-1-2001
Document Type
Article
DOI Link
Language
English
First Page
1613
Last Page
1615
WOS Identifier
ISSN
0003-6951
Recommended Citation
Chernyak, Leonid and Klimov, Mikhail, "Nanoscale p-n junction fabrication in silicon due to controlled dopant electromigration" (2001). Faculty Bibliography 2000s. 2533.
https://stars.library.ucf.edu/facultybib2000/2533
Comments
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