Xenon-emission-spectra identification in the 5-20-nm spectral region in highly ionized xenon capillary-discharge plasmas

    Authors

    M. A. Klosner;W. T. Silfvast

    Abbreviated Journal Title

    J. Opt. Soc. Am. B-Opt. Phys.

    Keywords

    SOFT-X-RAY; EXTREME-ULTRAVIOLET; LITHOGRAPHY; Optics

    Abstract

    We have identified intense extreme-ultraviolet emission spectra within the 5-20-nm wavelength region, originating from transitions in the Xe8+, Xe9+, Xe10+, and Xe11+ ion species, which were generated in high-current pulsed capillary discharges operating with xenon gas. We have also obtained a time-dependent estimate of the plasma electron temperature for these plasmas at peak pulsed current densities in the range of 400-800 kA/cm(2). (C) 2000 Optical Society of America [S0740-3224(00)01807-5].

    Journal Title

    Journal of the Optical Society of America B-Optical Physics

    Volume

    17

    Issue/Number

    7

    Publication Date

    1-1-2000

    Document Type

    Article

    Language

    English

    First Page

    1279

    Last Page

    1290

    WOS Identifier

    WOS:000088041800023

    ISSN

    0740-3224

    Share

    COinS