Title
High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 13.5 nm
Abbreviated Journal Title
Appl. Optics
Keywords
LITHOGRAPHY; IONS; Optics
Abstract
We describe a high-temperature lithium extreme-ultraviolet (EW) source based on a capillary discharge configuration that was developed for operating with metal vapors. The source produces narrow-band emission at 13.5 nm in the EUV spectral region, with emission intensity proportional to the lithium-vapor density. At an operating temperature of 725 degrees C, our measurements showed that, on axis, the source generated approximately 0.2 (mJ/2 pi sr)/pulse at 13.5 nm. (C) 2000 Optical Society of America.
Journal Title
Applied Optics
Volume
39
Issue/Number
21
Publication Date
1-1-2000
Document Type
Article
Language
English
First Page
3678
Last Page
3682
WOS Identifier
ISSN
1559-128X
Recommended Citation
"High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 13.5 nm" (2000). Faculty Bibliography 2000s. 2648.
https://stars.library.ucf.edu/facultybib2000/2648