High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 13.5 nm

    Authors

    M. A. Klosner;W. T. Silfvast

    Abbreviated Journal Title

    Appl. Optics

    Keywords

    LITHOGRAPHY; IONS; Optics

    Abstract

    We describe a high-temperature lithium extreme-ultraviolet (EW) source based on a capillary discharge configuration that was developed for operating with metal vapors. The source produces narrow-band emission at 13.5 nm in the EUV spectral region, with emission intensity proportional to the lithium-vapor density. At an operating temperature of 725 degrees C, our measurements showed that, on axis, the source generated approximately 0.2 (mJ/2 pi sr)/pulse at 13.5 nm. (C) 2000 Optical Society of America.

    Journal Title

    Applied Optics

    Volume

    39

    Issue/Number

    21

    Publication Date

    1-1-2000

    Document Type

    Article

    Language

    English

    First Page

    3678

    Last Page

    3682

    WOS Identifier

    WOS:000088345900017

    ISSN

    1559-128X

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