Title

STEM analysis of FIB damage in silicon

Authors

Authors

C. U. Shannon; B. I. Prenitzer; L. A. Giannuzzi; S. R. Brown; T. L. Shofner; B. Rossi; C. A. Vartuli; R. B. Irwin;F. A. Stevie

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Keywords

TEM; Instruments & Instrumentation; Microscopy; Physics, Multidisciplinary; Spectroscopy

Journal Title

Microbeam Analysis 2000, Proceedings

Issue/Number

165

Publication Date

1-1-2000

Document Type

Article

Language

English

First Page

177

Last Page

178

WOS Identifier

WOS:000166835400089

ISSN

0951-3248; 0-7503-0685-8

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