STEM analysis of FIB damage in silicon

    Authors

    C. U. Shannon; B. I. Prenitzer; L. A. Giannuzzi; S. R. Brown; T. L. Shofner; B. Rossi; C. A. Vartuli; R. B. Irwin;F. A. Stevie

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Keywords

    TEM; Instruments & Instrumentation; Microscopy; Physics, Multidisciplinary; Spectroscopy

    Journal Title

    Microbeam Analysis 2000, Proceedings

    Issue/Number

    165

    Publication Date

    1-1-2000

    Document Type

    Article

    Language

    English

    First Page

    177

    Last Page

    178

    WOS Identifier

    WOS:000166835400089

    ISSN

    0951-3248; 0-7503-0685-8

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