Advanced sample preparation techniques for SIMS analysis of semiconductor materials

    Authors

    F. A. Stevie; T. L. Shofner; F. Hillion; H. Francois-Saint-Cyr; T. Kimble; K. Elshot;K. A. Richardson

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Keywords

    Instruments & Instrumentation; Microscopy; Physics, Multidisciplinary; Spectroscopy

    Journal Title

    Microbeam Analysis 2000, Proceedings

    Issue/Number

    165

    Publication Date

    1-1-2000

    Document Type

    Article

    Language

    English

    First Page

    325

    Last Page

    326

    WOS Identifier

    WOS:000166835400163

    ISSN

    0951-3248; 0-7503-0685-8

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