Title

Electrical studies on amorphous silicon carbide nitride films

Authors

Authors

Z. Alizadeh;K. B. Sundaram

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

J. Mater. Sci. Lett.

Keywords

BETA-SI3N4; Materials Science, Multidisciplinary

Journal Title

Journal of Materials Science Letters

Volume

21

Issue/Number

1

Publication Date

1-1-2002

Document Type

Article

Language

English

First Page

7

Last Page

8

WOS Identifier

WOS:000173999600002

ISSN

0261-8028

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