Electrical studies on amorphous silicon carbide nitride films

    Authors

    Z. Alizadeh;K. B. Sundaram

    Comments

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    Abbreviated Journal Title

    J. Mater. Sci. Lett.

    Keywords

    BETA-SI3N4; Materials Science, Multidisciplinary

    Journal Title

    Journal of Materials Science Letters

    Volume

    21

    Issue/Number

    1

    Publication Date

    1-1-2002

    Document Type

    Article

    Language

    English

    First Page

    7

    Last Page

    8

    WOS Identifier

    WOS:000173999600002

    ISSN

    0261-8028

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