XPS analysis of FIB-milled Si

    Authors

    A. C. Ferryman; J. E. Fulghum; L. A. Giannuzzi;F. A. Stevie

    Abbreviated Journal Title

    Surf. Interface Anal.

    Keywords

    XPS; FIB; Si; surface oxidation; Ga contamination; spectra-from-images; FOCUSED-ION-BEAM; TRANSMISSION ELECTRON-MICROSCOPY; SECTIONAL SAMPLE; PREPARATION; TEM SPECIMEN PREPARATION; CROSS-SECTIONS; LIFT-OUT; FAILURE; ANALYSIS; SYSTEM; DAMAGE; Chemistry, Physical

    Abstract

    The development of focused ion beam (FIB) workstations with beam sizes < 10 run in diameter has initiated a revolution in the modification and characterization of materials on a nanoscale. Focused ion beams are now widely used to obtain site-specific specimens for scanning electron microscopy (SEM) and transmission electron microscopy (TEM) analyses, but are being utilized also in connection with Auger electron spectroscopy (AES) and secondary ion mass spectrometry (SIMS). In order to understand the structure/property relationships of new materials, it is imperative that nano-characterization techniques with site-specific precision be available. In this work, x-ray photoelectron spectroscopy and imaging are used to study the surface changes that occur due to FIB milling of Si(100). The FIB-prepared specimen was analyzed 'as received' and after the specimen was stored at room temperature and in the atmosphere for 5 months. The XPS images were acquired to determine the distribution of Si4+ (SiO2) and Ga contamination on the Si-0 surface. Small-area XPS spectra of the Si FIB specimen were collected to evaluate the changes in SiO2 surface concentration. The XPS spectra were also extracted from areas similar to1 mum x 1 mum by exploiting the images-to-spectra approach to XPS analysis. This study demonstrates both the problems inherent in the analysis of small samples and the critical information that can be obtained from high spatial resolution XPS analysis. In this example, increased SiO2 Was observed in the 'aged' sample relative to the 'as-received' sample, and non-uniform Ga contamination was detected. Copyright (C) 2002 John Wiley Sons, Ltd.

    Journal Title

    Surface and Interface Analysis

    Volume

    33

    Issue/Number

    12

    Publication Date

    1-1-2002

    Document Type

    Article

    Language

    English

    First Page

    907

    Last Page

    913

    WOS Identifier

    WOS:000179900700001

    ISSN

    0142-2421

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