Title

A physics-based model for the substrate resistance of MOSFETs

Authors

Authors

X. F. Gao; J. J. Liou; A. Ortiz-Conde; J. Bernier;G. Croft

Abbreviated Journal Title

Solid-State Electron.

Keywords

substrate resistance; MOSFETs; modeling; impact ionization; electrostatic discharge; BREAKDOWN; Engineering, Electrical & Electronic; Physics, Applied; Physics, ; Condensed Matter

Abstract

A compact and accurate model for the substrate resistance is essential and critical for the characterization of MOSFET operation, particularly for the case of relatively large drain current and sizeable substrate current. This paper develops such a model taking into account the effects of device geometry, impact ionization, and conductivity modulation. Comparison of the present and existing models is given, and results obtained from device simulation are included in support of the model. (C) 2002 Published by Elsevier Science Ltd.

Journal Title

Solid-State Electronics

Volume

46

Issue/Number

6

Publication Date

1-1-2002

Document Type

Article

Language

English

First Page

853

Last Page

857

WOS Identifier

WOS:000175817800011

ISSN

0038-1101

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