Design and fabrication of meso-scale variable capacitance motor for miniature heat pumps

    Authors

    R. Agrawal; Q. Hasan; N. Ashraf; K. B. Sundaram; L. C. Chow; J. S. Kapat;J. Vaidya

    Comments

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    Abbreviated Journal Title

    J. Micromech. Microeng.

    Keywords

    SIDE-DRIVE MOTORS; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics

    Abstract

    Miniaturization of the heat pump in the meso-scale power domain requires the development of the compressor integrated actuation units in the millimeter range. In this respect. a variable capacitance motor (VCM) is considered for compressor actuation. This work describes the design of a three-phase VCM. A microfabrication technique has been applied for the implementation of the motor using silicon technology. Some static electrical measurements have been conducted for the fabricated motor.

    Journal Title

    Journal of Micromechanics and Microengineering

    Volume

    13

    Issue/Number

    1

    Publication Date

    1-1-2003

    Document Type

    Article

    Language

    English

    First Page

    1

    Last Page

    7

    WOS Identifier

    WOS:000180628400001

    ISSN

    0960-1317

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