Magnetically-driven bi-directional optical microscanner

    Authors

    H. J. Cho;C. H. Ahn

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Abbreviated Journal Title

    J. Micromech. Microeng.

    Keywords

    MIRROR; MEMS; MICROMIRROR; SCANNER; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics

    Abstract

    A magnetically-driven bi-directional optical microscanner has been designed, fabricated and characterized. Magnetic and structural modeling and analysis has been applied to the design of the scanner. The micromachined scanner can be operated bi-directionally under the condition of static operation. Under dynamic operation, the prototype scanner has shown stable bi-directional scanning performance at the operating frequency of 30 Hz, corresponding to 60 Hz in the regular uni-directional scanner. Compared with a conventional scanner, the microscanner has the advantages of low power consumption due to its small size and high scanning efficiency as a result of unique bi-directional actuation.

    Journal Title

    Journal of Micromechanics and Microengineering

    Volume

    225

    Issue/Number

    3

    Publication Date

    1-1-2003

    Document Type

    Article

    Language

    English

    First Page

    383

    Last Page

    389

    WOS Identifier

    WOS:000187918002815

    ISSN

    0960-1317

    Share

    COinS