Title

Structural analysis of chalcogenide waveguides using Rutherford backscattering spectroscopy

Authors

Authors

C. Rivero; R. Sharek; W. Li; K. Richardson; A. Schulte; G. Braunstein; R. Irwin; V. Hamel; K. Turcotte;E. Knystautas

Comments

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Abbreviated Journal Title

Thin Solid Films

Keywords

chalcogenide glasses; Rutherford backscattering spectroscopy; Raman; spectroscopy; Materials Science, Multidisciplinary; Materials Science, Coatings &; Films; Physics, Applied; Physics, Condensed Matter

Abstract

Chalcogenide glasses are being investigated for waveguide and integrated optical component applications. In order to advance the novel properties exhibited by these glasses, it is crucial to identify the structure/property relationship in both bulk and film materials. Rutherford backscattering spectroscopy was used to obtain compositional, structural, and thickness information on the chalcogenide film structures. Results obtained showed no apparent variation in composition and small density variation in single layer As2S3 films. Multilayer films, in which thicknesses were measured using scanning electron microscope images, displayed compositional and density modifications associated with the annealing process. After a 1 year aging interval, the same analysis was conducted to ascertain changes induced by film aging. Stoichiometric and thickness modifications, caused by aging, were observed in nonannealed structures. No apparent changes were detected in annealed films. Raman spectroscopy was used as a complementary tool to identify the molecular features responsible for these changes. (C) 2002 Elsevier Science B.V. All rights reserved.

Journal Title

Thin Solid Films

Volume

425

Issue/Number

1-2

Publication Date

1-1-2003

Document Type

Article

Language

English

First Page

59

Last Page

67

WOS Identifier

WOS:000182542900009

ISSN

0040-6090

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