Authors

M. A. Gritz; M. Metzler; D. Malocha; M. Abdel-Rahman; B. Monacelli; G. Zummo;G. D. Boreman

Comments

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Abbreviated Journal Title

J. Vac. Sci. Technol. B

Keywords

MICROSTRIP ANTENNA; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Abstract

Wavelength tuning is demonstrated in an antenna-coupled infrared microbolometer. With a 300-mV control voltage, we observed a tuning range of 0.15 mum near 10 mum. A metal-oxide-semiconductor capacitor underneath the antenna arms causes the shift of resonance wavelength with applied voltage. We develop a device model that agrees with measured results.

Journal Title

Journal of Vacuum Science & Technology B

Volume

22

Issue/Number

6

Publication Date

1-1-2004

Document Type

Article; Proceedings Paper

Language

English

First Page

3133

Last Page

3136

WOS Identifier

WOS:000226439800106

ISSN

1071-1023

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