Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps

    Authors

    B. Li; Q. F. Chen; D. G. Lee; J. Woolman;G. P. Carman

    Comments

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    Abbreviated Journal Title

    Sens. Actuator A-Phys.

    Keywords

    microvalve and array; hydraulic actuator; electroforming; large flow; rate; high frequency; high pressure; Engineering, Electrical & Electronic; Instruments & Instrumentation

    Abstract

    A robust passive high frequency high pressure micro check valve was developed for piezoelectrically actuated pumps. A novel cross-patterned microvalve flap is used to increase the valve's structural stiffness with pressures up to 10 MPa. A mechanical valve stopper prevents valve-flap failure under extreme high pressure. The valve-flap is also designed to work at frequency larger than 10,000 Hz. The valve-flap was fabricated with electroformed nickel on silicon substrate. Deep RIE etching was used to fabricate the valve channels in the silicon substrate. The whole valve weighs 0.2 g including packaging. The microvalve flow rate (water) is measured to be 18 cm(3)/s under a pressure difference of 50 psi. The microvalve was integrated with a compact piezoelectric pump and produced pressure of 350 psi when operated at 10 kHz frequency. (C) 2004 Elsevier B.V. All rights reserved.

    Journal Title

    Sensors and Actuators a-Physical

    Volume

    117

    Issue/Number

    2

    Publication Date

    1-1-2005

    Document Type

    Article

    Language

    English

    First Page

    325

    Last Page

    330

    WOS Identifier

    WOS:000225343800019

    ISSN

    0924-4247

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