Title

Temperature feedback control for improving the stability of a semiconductor-metal-oxide (SMO) gas sensor

Authors

Authors

J. W. Gong; Q. F. Chen; M. R. Lian; N. C. Liu;C. Daoust

Comments

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Abbreviated Journal Title

IEEE Sens. J.

Keywords

feedback temperature control; microelectromechanical systems (MEMS); semiconductor-metal-oxide (SMO) sensor; sol gel; TIN-OXIDE; SENSITIVITY; ELEMENTS; SNO2; Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied

Abstract

Stability is a major concern of semiconductor-metal-oxide (SMO) gas sensors in practical applications, as they may cause false alarm problems. Ambient temperature is a major factor affecting the SMO gas sensor's stability. In this paper, we use a novel way to improve temperature stability of SMO (tin oxide) gas sensors by applying a temperature feedback control circuits which are compatible with our microelectromechanical systems senor fabrication. A built-in platinum temperature sensor can precisely detect the sensor's working temperature. It provides feedback information to compensate the microheater's current to maintain the sensor's working temperature constant, regardless of ambient temperature change. Test results showed that, with this approach, significant improvement of stability has been achieved compared to SMO gas sensors without temperature compensation under the same ambient variation. The algorithm is realized through a hardware circuit, whose advantages include real time, large feedback gain, and low cost.

Journal Title

Ieee Sensors Journal

Volume

6

Issue/Number

1

Publication Date

1-1-2006

Document Type

Article

Language

English

First Page

139

Last Page

145

WOS Identifier

WOS:000234723300018

ISSN

1530-437X

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