Temperature feedback control for improving the stability of a semiconductor-metal-oxide (SMO) gas sensor

    Authors

    J. W. Gong; Q. F. Chen; M. R. Lian; N. C. Liu;C. Daoust

    Comments

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    Abbreviated Journal Title

    IEEE Sens. J.

    Keywords

    feedback temperature control; microelectromechanical systems (MEMS); semiconductor-metal-oxide (SMO) sensor; sol gel; TIN-OXIDE; SENSITIVITY; ELEMENTS; SNO2; Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied

    Abstract

    Stability is a major concern of semiconductor-metal-oxide (SMO) gas sensors in practical applications, as they may cause false alarm problems. Ambient temperature is a major factor affecting the SMO gas sensor's stability. In this paper, we use a novel way to improve temperature stability of SMO (tin oxide) gas sensors by applying a temperature feedback control circuits which are compatible with our microelectromechanical systems senor fabrication. A built-in platinum temperature sensor can precisely detect the sensor's working temperature. It provides feedback information to compensate the microheater's current to maintain the sensor's working temperature constant, regardless of ambient temperature change. Test results showed that, with this approach, significant improvement of stability has been achieved compared to SMO gas sensors without temperature compensation under the same ambient variation. The algorithm is realized through a hardware circuit, whose advantages include real time, large feedback gain, and low cost.

    Journal Title

    Ieee Sensors Journal

    Volume

    6

    Issue/Number

    1

    Publication Date

    1-1-2006

    Document Type

    Article

    Language

    English

    First Page

    139

    Last Page

    145

    WOS Identifier

    WOS:000234723300018

    ISSN

    1530-437X

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