Micromachined nanocrystalline silver doped SnO2H2S sensor

    Authors

    J. W. Gong; Q. F. Chen; M. R. Lian; N. C. Liu; R. G. Stevenson;F. Adami

    Comments

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    Abbreviated Journal Title

    Sens. Actuator B-Chem.

    Keywords

    MEMS; nanocrystalline SMO; sol-gel; tin dioxide; hydrogen sulfide; H2S SENSING PROPERTIES; THIN-FILM; GAS SENSOR; MECHANISM; Chemistry, Analytical; Electrochemistry; Instruments & Instrumentation

    Abstract

    An ultrahigh sensitive hydrogen sulfide gas sensor was developed utilizing micromachined nanocrystalline SnO2-Ag on ceramic wafer (alumina). A polymeric sol-gel process has been successfully developed in fabricating thin film SnO2-Ag nanocomposite, which shows excellent sensing characteristics upon exposure to H2S as low as 1 ppm at working temperature as low as 70 degrees C. This sensor also shows higher sensitivity to H2S under various humidity conditions, in comparing to commercialized H2S sensors as well as published data. The environmental influences on sensor's sensitivity and selectivity have been tested and discussed. The results show that the sensor has a good selectivity due to its less sensitive to common interference gases like Cl-2, HCl, SO2, C6H14, CH4, CO, C3H8, etc. (c) 2005 Elsevier B.V. All rights reserved.

    Journal Title

    Sensors and Actuators B-Chemical

    Volume

    114

    Issue/Number

    1

    Publication Date

    1-1-2006

    Document Type

    Article

    Language

    English

    First Page

    32

    Last Page

    39

    WOS Identifier

    WOS:000236009300005

    ISSN

    0925-4005

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