Title

On-chip electrostatic discharge protection for CMOS gas sensor systems-on-a-chip (SoC)

Authors

Authors

J. A. Salcedo; J. J. Liou; M. Y. Afridi;A. R. Hefner

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Microelectron. Reliab.

Keywords

ESD PROTECTION; SCR; VOLTAGE; DEVICES; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Abstract

An on-chip electrostatic discharge (ESD) protection scheme is demonstrated for an emerging technology of microelectromechanical systems (MEMS)-based embedded sensor (ES) system-on-a-chip (SoC). The ESD protection scheme is implemented using ground-referenced multifinger thyristor-type devices optimized for (1) the input/output (I/O) protection, (2) the power supply clamp, and (3) the internal sensors' electrodes during the micromachining process. The ESD structure developed demonstrates a leakage current below 10(-10) A, high on-state conductance, and high level of human body model (HBM) immunity. (c) 2006 Elsevier Ltd. All rights reserved.

Journal Title

Microelectronics Reliability

Volume

46

Issue/Number

8

Publication Date

1-1-2006

Document Type

Article; Proceedings Paper

Language

English

First Page

1285

Last Page

1294

WOS Identifier

WOS:000240289200010

ISSN

0026-2714

Share

COinS