On-chip electrostatic discharge protection for CMOS gas sensor systems-on-a-chip (SoC)

    Authors

    J. A. Salcedo; J. J. Liou; M. Y. Afridi;A. R. Hefner

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Abbreviated Journal Title

    Microelectron. Reliab.

    Keywords

    ESD PROTECTION; SCR; VOLTAGE; DEVICES; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

    Abstract

    An on-chip electrostatic discharge (ESD) protection scheme is demonstrated for an emerging technology of microelectromechanical systems (MEMS)-based embedded sensor (ES) system-on-a-chip (SoC). The ESD protection scheme is implemented using ground-referenced multifinger thyristor-type devices optimized for (1) the input/output (I/O) protection, (2) the power supply clamp, and (3) the internal sensors' electrodes during the micromachining process. The ESD structure developed demonstrates a leakage current below 10(-10) A, high on-state conductance, and high level of human body model (HBM) immunity. (c) 2006 Elsevier Ltd. All rights reserved.

    Journal Title

    Microelectronics Reliability

    Volume

    46

    Issue/Number

    8

    Publication Date

    1-1-2006

    Document Type

    Article; Proceedings Paper

    Language

    English

    First Page

    1285

    Last Page

    1294

    WOS Identifier

    WOS:000240289200010

    ISSN

    0026-2714

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