Focused-ion-beam fabrication of ZnO nanorod-based UV photodetector using the in-situ lift-out technique

    Authors

    O. Lupan; L. Chow; G. Y. Chai; L. Chernyak; O. Lopatiuk-Tirpak;H. Heinrich

    Comments

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    Abstract

    ZnO nanorods and nanowires are promising candidates as new types of high-sensitivity ultraviolet (UV) photodetectors due to their wide bandgap and large aspect ratio. In this study, single-crystalline ZnO nanorods were grown on glass substrates by a hydrothermal method. Specific structural, morphological, electrical, and optical measurements were carried out. A single ZnO nanorod-based photodetector was fabricated using the in-situ lift-out technique in a focused ion beam (FIB/SEM) instrument and characterized. With a source wavelength of 370 nm and an applied bias of 1 V, the responsivity of the ZnO nancrod is 30 mA/W. The single ZnO nanorod photodetector exhibits an ultraviolet (UV) photoresponse promising for potential applications as cost-effective UV detectors. [GRAPHICS] Secondary electron images in the focused ion-beam system showing the steps of the in-situ lift-out fabrication procedure in the FIB/SEM instrument. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

    Journal Title

    Physica Status Solidi a-Applications and Materials Science

    Volume

    205

    Issue/Number

    11

    Publication Date

    1-1-2008

    Document Type

    Article

    First Page

    2673

    Last Page

    2678

    WOS Identifier

    WOS:000261088200040

    ISSN

    1862-6300

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