Comparative extreme ultraviolet emission measurements for lithium and tin laser plasmas

Authors

    Authors

    S. A. George; W. T. Silfvast; K. Takenoshita; R. T. Bernath; C. S. Koay; G. Shimkaveg;M. C. Richardson

    Comments

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    Abbreviated Journal Title

    Opt. Lett.

    Keywords

    LITHOGRAPHY; Optics

    Abstract

    Detailed spectroscopic studies on extreme UV emission from laser plasmas using tin and lithium planar solid targets were completed. At 13.5 nm, the best conversion efficiency (CE) for lithium was found to be 2.2% at intensities near 7 x 10(10) W/cm(2). The highest CE measured for tin was near 5.0% at an intensity close to 1 x 10(11) W/cm(2). (c) 2007 Optical Society of America.

    Journal Title

    Optics Letters

    Volume

    32

    Issue/Number

    8

    Publication Date

    1-1-2007

    Document Type

    Article

    Language

    English

    First Page

    997

    Last Page

    999

    WOS Identifier

    WOS:000245520400039

    ISSN

    0146-9592

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