Throughput performance analysis for closed-loop vehicle-based material handling systems

    Authors

    D. Nazzal;L. F. McGinnis

    Comments

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    Abstract

    A computationally effective analysis of the throughput performance of a closed-loop multi-vehicle automated material handling system (AMHS) used in highly automated 300 mm wafer fabrication facilities (fabs) is presented. A probabilistic model is developed, based on a detailed description of AMHS operations, and the system is analyzed as an extended Markov chain. The model represents vehicle operations on the closed-loop considering the possibility of vehicle blocking. This analysis provides essential parameters such as the vehicle blocking probabilities and the throughput capacity of the AMHS. A numerical example is analyzed and simulated using AutoMod to demonstrate and validate the stochastic model.

    Journal Title

    Iie Transactions

    Volume

    40

    Issue/Number

    11

    Publication Date

    1-1-2008

    Document Type

    Article

    First Page

    1097

    Last Page

    1106

    WOS Identifier

    WOS:000258774000009

    ISSN

    0740-817X

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