Authors

D. J. Shelton; J. S. Tharp; G. Zummo; W. R. Folks;G. D. Boreman

Comments

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Abbreviated Journal Title

J. Vac. Sci. Technol. B

Keywords

SURFACES; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Abstract

Periodic metallic microstructures were fabricated on polyimide membranes. Techniques were developed to maintain flatness of the membrane during processing while still allowing for flexibility in the final structure. For proper functionality of the structures, it was necessary to first fabricate a continuous metallic film and a continuous dielectric layer on top of the flexible substrate, which underlaid the periodic microstructure. Flexibility of the overall structure was maintained by using a polymer as the dielectric layer, which was constrained to have high optical transmission over the infrared wavelength range of 6-14 mu m. Three candidate polymers were evaluated, and their measured optical properties are presented. Benzocyclobutene was found to be the best choice for this application. The final structure fully populated a 10 cm (4 in.) diameter flexible membrane with microstructures of excellent uniformity. (C) 2007 American Vacuum Society.

Journal Title

Journal of Vacuum Science & Technology B

Volume

25

Issue/Number

6

Publication Date

1-1-2007

Document Type

Article

Language

English

First Page

1827

Last Page

1831

WOS Identifier

WOS:000251611900014

ISSN

1071-1023

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