Title

Site-specific transmission electron microscope characterization of micrometer-sized particles using the focused ion beam lift-out technique

Authors

Authors

J. K. Lomness; L. A. Giannuzzi;M. D. Hampton

Comments

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Abbreviated Journal Title

Microsc. microanal.

Keywords

micrometer powder particles; focused ion beam; site-specific; transmission electron microscope specimen preparation; transmission; electron microscope analysis of micrometer-sized particles; transmission; electron microscopy; TEM SPECIMEN PREPARATION; Materials Science, Multidisciplinary; Microscopy

Abstract

Micrometer sized particles have been studied to show that a high-quality transmission electron microscope (TEM) specimen can be produced, without the use of embedding media, from a site-specific region of chosen particles using the focused ion beam (FIB) lift-out (LO) technique. The uniqueness of this technique is that site-specific TEM LO specimens maybe obtained from particles and from regions which are smaller than the conventional similar to 10-20 mum x 5 mum x similar to0.1 mum dimensions of the LO specimen. The innovative FIB LO procedures are described in detail and TEM images of electron transparent specimens obtained from specific micrometer-sized particles are presented.

Journal Title

Microscopy and Microanalysis

Volume

7

Issue/Number

5

Publication Date

1-1-2001

Document Type

Article

Language

English

First Page

418

Last Page

423

WOS Identifier

WOS:000171412800003

ISSN

1431-9276

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