Site-specific transmission electron microscope characterization of micrometer-sized particles using the focused ion beam lift-out technique

    Authors

    J. K. Lomness; L. A. Giannuzzi;M. D. Hampton

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Abbreviated Journal Title

    Microsc. microanal.

    Keywords

    micrometer powder particles; focused ion beam; site-specific; transmission electron microscope specimen preparation; transmission; electron microscope analysis of micrometer-sized particles; transmission; electron microscopy; TEM SPECIMEN PREPARATION; Materials Science, Multidisciplinary; Microscopy

    Abstract

    Micrometer sized particles have been studied to show that a high-quality transmission electron microscope (TEM) specimen can be produced, without the use of embedding media, from a site-specific region of chosen particles using the focused ion beam (FIB) lift-out (LO) technique. The uniqueness of this technique is that site-specific TEM LO specimens maybe obtained from particles and from regions which are smaller than the conventional similar to 10-20 mum x 5 mum x similar to0.1 mum dimensions of the LO specimen. The innovative FIB LO procedures are described in detail and TEM images of electron transparent specimens obtained from specific micrometer-sized particles are presented.

    Journal Title

    Microscopy and Microanalysis

    Volume

    7

    Issue/Number

    5

    Publication Date

    1-1-2001

    Document Type

    Article

    Language

    English

    First Page

    418

    Last Page

    423

    WOS Identifier

    WOS:000171412800003

    ISSN

    1431-9276

    Share

    COinS