Femtosecond laser deep hole drilling of silicate glasses in air

    Authors

    L. Shah; J. Tawney; M. Richardson;K. Richardson

    Abbreviated Journal Title

    Appl. Surf. Sci.

    Keywords

    femtosecond laser ablation; silicate glasses; self-focusing; ULTRASHORT-PULSE LASER; FLIGHT MASS-SPECTROSCOPY; SUBPICOSECOND PULSES; INDUCED BREAKDOWN; PHASE-EXPLOSION; ABLATION; NANOSECOND; TRANSITIONS; DIELECTRICS; GENERATION; Chemistry, Physical; Materials Science, Coatings & Films; Physics, ; Applied; Physics, Condensed Matter

    Abstract

    Femtosecond laser pulses are ideal for many precise and delicate laser processing applications. In this work, we demonstrate that femtosecond laser pulses can be used to produce microscopic holes (< 100)mum diameter) with macroscopic depth ( > 1 mm) in silicate glasses at atmospheric pressures. These experiments indicate that self-focusing is an important factor affecting hole depth at high laser intensity. (C) 2001 Elsevier Science B.V All rights reserved.

    Journal Title

    Applied Surface Science

    Volume

    183

    Issue/Number

    3-4

    Publication Date

    1-1-2001

    Document Type

    Article

    Language

    English

    First Page

    151

    Last Page

    164

    WOS Identifier

    WOS:000172506500001

    ISSN

    0169-4332

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