Title

A generalized finite element method for hydrodynamic modeling of short-channel devices

Authors

Authors

M. Shen; M. C. Cheng;J. J. Liou

Abbreviated Journal Title

VLSI Des.

Keywords

hydrodynamic model; device simulation; least squares finite element; SEMICONDUCTOR-DEVICES; EQUATIONS; Computer Science, Hardware & Architecture; Engineering, Electrical &; Electronic

Abstract

A finite element method based on the least-squares scheme is developed for hydrodynamic simulation of two-dimensional short-channel semiconductor devices. Although this general-purpose finite element method has been shown in fluid dynamics to be more universal to flow problems than other finite element approaches and has been applied in recent years to a wide range of problems in fluid dynamics, it is still unfamiliar to the semiconductor device community. Application of the developed hydrodynamic least squares finite element method (LSFEM) to simulation of a 2D MESFET with a deep-submicron gate has demonstrated its robustness and effectiveness for the hydrodynamic device simulation.

Journal Title

Vlsi Design

Volume

13

Issue/Number

1-4

Publication Date

1-1-2001

Document Type

Article; Proceedings Paper

Language

English

First Page

79

Last Page

84

WOS Identifier

WOS:000173295000012

ISSN

1065-514X

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