Title
Electrostatically actuated 1 x 2 micromechanical optic switch
Abbreviated Journal Title
Electron. Lett.
Keywords
Engineering, Electrical & Electronic
Abstract
A micro-opto-mechanical 1 x 2 switch has been realised using silicon oxynitride (SiON) planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of a cantilever beam due to electrostatic interaction. The device concept and performance is reported. The switch is monolithically integrated on a silicon substrate and has many; potential applications in fibre-optic local area networks.
Journal Title
Electronics Letters
Volume
37
Issue/Number
7
Publication Date
1-1-2001
Document Type
Article
Language
English
First Page
451
Last Page
452
WOS Identifier
ISSN
0013-5194
Recommended Citation
"Electrostatically actuated 1 x 2 micromechanical optic switch" (2001). Faculty Bibliography 2000s. 8225.
https://stars.library.ucf.edu/facultybib2000/8225