Electrostatically actuated 1 x 2 micromechanical optic switch

    Authors

    I. Shubin;P. L. K. Wa

    Abbreviated Journal Title

    Electron. Lett.

    Keywords

    Engineering, Electrical & Electronic

    Abstract

    A micro-opto-mechanical 1 x 2 switch has been realised using silicon oxynitride (SiON) planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of a cantilever beam due to electrostatic interaction. The device concept and performance is reported. The switch is monolithically integrated on a silicon substrate and has many; potential applications in fibre-optic local area networks.

    Journal Title

    Electronics Letters

    Volume

    37

    Issue/Number

    7

    Publication Date

    1-1-2001

    Document Type

    Article

    Language

    English

    First Page

    451

    Last Page

    452

    WOS Identifier

    WOS:000168056200032

    ISSN

    0013-5194

    Share

    COinS