Femtosecond fiber laser enables reliable wafer-level processing

    Authors

    L. Shah; K. Monro;G. C. Cho

    Comments

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    Abstract

    Wafers singulated by a high-repetition-rate femtosecond fiber laser at high scan speeds show significantly higher breakage strength than those processed by a nanosecond laser.

    Journal Title

    Laser Focus World

    Volume

    44

    Issue/Number

    12

    Publication Date

    1-1-2008

    Document Type

    Article

    First Page

    61

    Last Page

    +

    WOS Identifier

    WOS:000261756600023

    ISSN

    1043-8092

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