Title

Femtosecond fiber laser enables reliable wafer-level processing

Authors

Authors

L. Shah; K. Monro;G. C. Cho

Comments

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Abstract

Wafers singulated by a high-repetition-rate femtosecond fiber laser at high scan speeds show significantly higher breakage strength than those processed by a nanosecond laser.

Journal Title

Laser Focus World

Volume

44

Issue/Number

12

Publication Date

1-1-2008

Document Type

Article

First Page

61

Last Page

+

WOS Identifier

WOS:000261756600023

ISSN

1043-8092

Recommended Citation

"Femtosecond fiber laser enables reliable wafer-level processing" (2008). Faculty Bibliography 2000s. 967.
https://stars.library.ucf.edu/facultybib2000/967