Title

Study of the Acoustoelectric Effect for SAW Sensors

Authors

Authors

B. H. Fisher;D. C. Malocha

Comments

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Abbreviated Journal Title

IEEE Trans. Ultrason. Ferroelectr. Freq. Control

Keywords

SURFACE ACOUSTIC-WAVES; HYDROGEN DETECTION; ELECTRICAL-CONDUCTION; INTERACTION SPEED; BILAYER STRUCTURE; THIN-FILMS; PALLADIUM; SYSTEM; ABSORPTION; TRANSPORT; Acoustics; Engineering, Electrical & Electronic

Abstract

Research has recently begun on the use of ultrathin films and nanoclusters as mechanisms for sensing of gases, liquids, etc., because the basic material parameters may change because of film morphology. As films of various materials are applied to the surface of SAW devices for sensors, the conductivity of the films may have a strong acoustoelectric effect, whether desired or not. The purpose of this paper is to reexamine the theory and predictions of the acoustoelectric effect for SAW interactions with thin conducting or semi-conducting films. The paper will summarize the theory and predict the effects of thin film conductivity on SAW velocity and propagation loss versus frequency and substrate material. The theory predicts regions of conductivity which result in extremely high propagation loss, and which also correspond to the mid-point between the open and short-circuit velocities. As an example of the verification and possible usefulness of the acoustoelectric effect, recent experimental results of palladium (Pd) thin films on a YZ LiNbO(3) SAW delay line have shown large changes in propagation loss, depending on the Pd film thickness, exposure to hydrogen gas, or both. By proper design, a sensitive hydrogen leak detector SAW sensor can be designed.

Journal Title

Ieee Transactions on Ultrasonics Ferroelectrics and Frequency Control

Volume

57

Issue/Number

3

Publication Date

1-1-2010

Document Type

Article; Proceedings Paper

Language

English

First Page

698

Last Page

706

WOS Identifier

WOS:000275322400028

ISSN

0885-3010

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