Effect of Substrate Temperature on Optical Properties of BCN Thin Films

    Authors

    V. O. Todi;K. B. Sundaram

    Comments

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    Abbreviated Journal Title

    Electrochem. Solid State Lett.

    Keywords

    CHEMICAL-VAPOR-DEPOSITION; PULSED-LASER DEPOSITION; CUBIC BORON-NITRIDE; ELECTRONIC-STRUCTURE; B-N; COATINGS; CARBON; GROWTH; AUGER; XPS; Electrochemistry; Materials Science, Multidisciplinary

    Abstract

    The amorphous boron-carbon-nitrogen (BCN) thin films were prepared by RF magnetron sputtering from a B(4)C target in argon and nitrogen gas ambient. The substrate temperature was varied from room temperature to 500 degrees C. The structural and bonding characteristics were studied by X-ray photoelectron spectroscopy (XPS) and the optical properties were characterized by UV-Visible spectrophotometer. For different substrate temperatures, the optical band gaps (E(opt)) ranged from 3.5-4.8 eV and refractive index were in the range of 2.66-1.5. The reported band gap values are significantly higher than the band gap values usually reported elsewhere in the literature for sputter deposited BCN thin films. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3610430] All rights reserved.

    Journal Title

    Electrochemical and Solid State Letters

    Volume

    14

    Issue/Number

    10

    Publication Date

    1-1-2011

    Document Type

    Article

    Language

    English

    First Page

    G49

    Last Page

    G51

    WOS Identifier

    WOS:000295211600018

    ISSN

    1099-0062

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