Synthesis of Spherical Non-Oxide Silicon Carbonitride Ceramic Particles

    Authors

    Y. X. Yu; Y. H. Chen; C. Y. Xu; J. Y. Fang;L. N. An

    Comments

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    Abbreviated Journal Title

    J. Am. Ceram. Soc.

    Keywords

    PRECIPITATION POLYMERIZATION; POLY(DIVINYLBENZENE) MICROSPHERES; SIALCN; CERAMICS; SICN MEMS; FABRICATION; GROWTH; PRECURSOR; MECHANISM; SPHERES; SIZE; Materials Science, Ceramics

    Abstract

    In this article, we report a simple technique for synthesizing spherical non-oxide silicon carbonitride ceramic particles from a polysilazane precursor. In this technique, the spherical particles of the polysilazane precursor were synthesized first via a precipitation polymerization process and then converted to ceramic particles by pyrolysis. The resultant ceramic particles exhibited a close-to-perfect spherical shape and a narrow size distribution around 430 nm. The precipitation and pyrolysis processes were characterized using SEM, TEM, FTIR, and XRD to illustrate the formation mechanisms of the ceramic particles.

    Journal Title

    Journal of the American Ceramic Society

    Volume

    94

    Issue/Number

    9

    Publication Date

    1-1-2011

    Document Type

    Article

    Language

    English

    First Page

    2779

    Last Page

    2782

    WOS Identifier

    WOS:000295215900016

    ISSN

    0002-7820

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