Title
Surface morphologies of homoepitaxial ZnO thin films on non-miscut ZnO substrates
Abbreviated Journal Title
Appl. Surf. Sci.
Keywords
Non-miscut ZnO substrates; Molecular beam epitaxy; Homoepitaxy; Atomic; force microscopy; Surface morphology; PULSED-LASER DEPOSITION; MOLECULAR-BEAM EPITAXY; LOW-TEMPERATURE; PLASMA; POLAR; Chemistry, Physical; Materials Science, Coatings & Films; Physics, ; Applied; Physics, Condensed Matter
Abstract
ZnO thin films were grown on Zn-polar non-miscut ZnO substrates by plasma-assisted molecular beam epitaxy (PAMBE). With an electrostatic ion trap applied to the oxygen plasma source, the etching effect by plasma was significantly reduced. Atomically flat surfaces with one monolayer step height along the [0001] direction were achieved at a low growth temperature of 610 degrees C. Good surface morphology with root mean square (RMS) roughness as small as 0.16 nm was achieved. High oxygen plasma power and low Zn flux were necessary to achieve a step-flow growth mode with a homogeneous surface morphology. It was found that the growth rate and surface RMS roughness decreased with increased growth temperature. (C) 2013 Elsevier B.V. All rights reserved.
Journal Title
Applied Surface Science
Volume
277
Publication Date
1-1-2013
Document Type
Article
Language
English
First Page
263
Last Page
267
WOS Identifier
ISSN
0169-4332
Recommended Citation
"Surface morphologies of homoepitaxial ZnO thin films on non-miscut ZnO substrates" (2013). Faculty Bibliography 2010s. 2581.
https://stars.library.ucf.edu/facultybib2010/2581
Comments
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