Authors

J. E. Harvey; S. Schroder; N. Choi;A. Duparre

Comments

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Abbreviated Journal Title

Opt. Eng.

Keywords

surface scatter; total integrated scatter; TIS; scattering from rough; surfaces; bidirectional reflectance distribution function; BRDF; surface; power spectral density function; PSD; relevant band-limited roughness; OPTICAL THIN-FILMS; LIGHT-SCATTERING; SPECULAR REFLECTANCE; RESOLVED; SCATTERING; ULTRAVIOLET; COATINGS; MICROROUGHNESS; PERFORMANCE; COMPONENTS; FINISH; Optics

Abstract

Surface scatter effects from residual optical fabrication errors can severely degrade optical performance. The total integrated scatter (TIS) from a given mirror surface is determined by the ratio of the spatial frequency band-limited "relevant" root-mean-square surface roughness to the wavelength of light. For short-wavelength (extreme-ultraviolet/x-ray) applications, even state-of-the-art optical surfaces can scatter a significant fraction of the total reflected light. In this paper we first discuss how to calculate the band-limited relevant roughness from surface metrology data, then present parametric plots of the TIS for optical surfaces with arbitrary roughness, surface correlation widths, and incident angles. Surfaces with both Gaussian and ABC or K-correlation power spectral density functions have been modeled. These parametric TIS predictions provide insight that is useful in determining realistic optical fabrication tolerances necessary to satisfy specific optical performance requirements.

Journal Title

Optical Engineering

Volume

51

Issue/Number

1

Publication Date

1-1-2012

Document Type

Article

Language

English

First Page

11

WOS Identifier

WOS:000300611300028

ISSN

0091-3286

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