Abbreviated Journal Title
Appl. Phys. Lett.
Keywords
PARAMETERS; ZNO; Physics, Applied
Abstract
Cubic Zn1-xMgxO thin films were produced by Plasma-Enhanced Molecular Beam Epitaxy. Oxygen flow rate and applied Radio-Frequency (RF) plasma power were varied to investigate the impact on film growth and optoelectronic device performance. Solar-blind and visible-blind detectors were fabricated with metal-semiconductor-metal interdigitated Ni/Mg/Au contacts and responsivity is compared under different growth conditions. Increasing oxygen flow rate and RF plasma power increased Zn incorporation in the film, which leads to phase segregation at relatively high Zn/Mg ratio. Responsivity as high as 61 A/W was measured in phase-segregated ZnMgO visible-blind detectors.
Journal Title
Applied Physics Letters
Volume
103
Issue/Number
3
Publication Date
1-1-2013
Document Type
Article
DOI Link
Language
English
First Page
4
WOS Identifier
ISSN
0003-6951
Recommended Citation
Boutwell, R. Casey; Wei, Ming; and Schoenfeld, Winston V., "The effect of oxygen flow rate and radio frequency plasma power on cubic ZnMgO ultraviolet sensors grown by plasma-enhanced molecular beam epitaxy" (2013). Faculty Bibliography 2010s. 3730.
https://stars.library.ucf.edu/facultybib2010/3730
Comments
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"This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in the linked citation and may be found originally at Applied Physics Letters."