GaN Thin Film Based Light Addressable Potentiometric Sensor for pH Sensing Application

    Authors

    A. Das; A. Das; L. B. Chang; C. S. Lai; R. M. Lin; F. C. Chu; Y. H. Lin; L. Chow;M. J. Jeng

    Comments

    Authors: contact us about adding a copy of your work at [email protected]

    Abbreviated Journal Title

    Appl. Phys. Express

    Keywords

    CARRIER DIFFUSION LENGTH; SPATIAL-RESOLUTION; PULSE TECHNIQUE; LAPS; CAPACITORS; PENICILLIN; NITRIDE; DEVICES; SILICON; Physics, Applied

    Abstract

    Gallium nitride (GaN) is a material with remarkable properties, including wide band gap, direct light emission and excellent chemical stability. In this study, a GaN-based light addressable potentiometric sensor (LAPS) with Si3N4 similar to 50nm as a sensing membrane is fabricated. By modulated optical excitation from an ultraviolet 365 nm light-emitting diode, the photoresponse characteristic and related pH sensitivity of the fabricated GaN-based LAPS is investigated. A Nernstian-like pH response with pH sensitivity of 52.29 mV/pH and linearity of 99.13% is obtained. These results of the GaN-based LAPS show great promise and it could be used as a single chemical sensor or integrated optoelectronic chemical sensor array for biomedical research with high spatial resolution. (C) 2013 The Japan Society of Applied Physics

    Journal Title

    Applied Physics Express

    Volume

    6

    Issue/Number

    3

    Publication Date

    1-1-2013

    Document Type

    Article

    Language

    English

    First Page

    3

    WOS Identifier

    WOS:000315938100031

    ISSN

    1882-0778

    Share

    COinS
     

    Accessibility Statement

    This item was created or digitized prior to April 24, 2027, or is a reproduction of legacy media created before that date. It is preserved in its original, unmodified state specifically for research, reference, or historical recordkeeping. In accordance with the ADA Title II Final Rule, the University Libraries provides accessible versions of archival materials upon request. To request an accommodation for this item, please submit an accessibility request form.