Title

High-speed multiphoton absorption polymerization: fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios

Authors

Authors

G. Kumi; C. O. Yanez; K. D. Belfield;J. T. Fourkas

Comments

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Abbreviated Journal Title

Lab Chip

Keywords

3-DIMENSIONAL MICROFABRICATION; PHOTOPOLYMERIZATION; LITHOGRAPHY; POLY(DIMETHYLSILOXANE); PHOTORESIST; SURFACES; SYSTEMS; DESIGN; SU-8; Biochemical Research Methods; Chemistry, Multidisciplinary; Nanoscience; & Nanotechnology

Abstract

We demonstrate the use of high-speed, multiphoton absorption polymerization ( MAP) for the fabrication of large-area microfluidic master structures. High-speed fabrication in SU8 without laser-induced damage is made possible by the use of a novel photoacid generator with a high two-photon-absorption cross-section. Master structures fabricated with MAP can be used to produce polydimethylsiloxane microchannels with high aspect ratios and/or arbitrary cross-sections. Microchannels with different cross-sections and heights can be combined readily in a single device. This fabrication technique significantly increases the diversity of channel architectures available for microfluidic devices.

Journal Title

Lab on a Chip

Volume

10

Issue/Number

8

Publication Date

1-1-2010

Document Type

Article

Language

English

First Page

1057

Last Page

1060

WOS Identifier

WOS:000276218900013

ISSN

1473-0197

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