High-speed multiphoton absorption polymerization: fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios

    Authors

    G. Kumi; C. O. Yanez; K. D. Belfield;J. T. Fourkas

    Comments

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    Abbreviated Journal Title

    Lab Chip

    Keywords

    3-DIMENSIONAL MICROFABRICATION; PHOTOPOLYMERIZATION; LITHOGRAPHY; POLY(DIMETHYLSILOXANE); PHOTORESIST; SURFACES; SYSTEMS; DESIGN; SU-8; Biochemical Research Methods; Chemistry, Multidisciplinary; Nanoscience; & Nanotechnology

    Abstract

    We demonstrate the use of high-speed, multiphoton absorption polymerization ( MAP) for the fabrication of large-area microfluidic master structures. High-speed fabrication in SU8 without laser-induced damage is made possible by the use of a novel photoacid generator with a high two-photon-absorption cross-section. Master structures fabricated with MAP can be used to produce polydimethylsiloxane microchannels with high aspect ratios and/or arbitrary cross-sections. Microchannels with different cross-sections and heights can be combined readily in a single device. This fabrication technique significantly increases the diversity of channel architectures available for microfluidic devices.

    Journal Title

    Lab on a Chip

    Volume

    10

    Issue/Number

    8

    Publication Date

    1-1-2010

    Document Type

    Article

    Language

    English

    First Page

    1057

    Last Page

    1060

    WOS Identifier

    WOS:000276218900013

    ISSN

    1473-0197

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