FIB fabrication of ZnO nanotetrapod and cross-sensor

    Authors

    L. Chow; O. Lupan;G. Y. Chai

    Comments

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    Abbreviated Journal Title

    Phys. Status Solidi B-Basic Solid State Phys.

    Keywords

    II-VI semiconductors; nanocrystalline materials; optical detectors; HYDROGEN GAS NANOSENSOR; Physics, Condensed Matter

    Abstract

    This article presents the fabrication of zinc oxide (ZnO) nanotetrapod and cross-nanorods-based sensors. This low-dimensional device is made in a focused ion beam set-up by using nanodeposition for metal electrodes. The gas response of the sensor based on an individual zinc oxide nanotetrapod and on crossed ZnO nanorod for detection of ultraviolet (UV) light and hydrogen at room temperature is presented. It is shown that ZnO tetrapod has potential application as UV and as chemical sensor with multi-terminal construction. The chemisorbed gas molecules on the ZnO surface can extract or donate electrons to ZnO and this effect was used to monitor the electrical resistance values change of the tetrapod sensor. ZnO tetrapod sensor demonstrates sensitivity and selectivity in resistance upon exposure to UV light, H(2), O(2), NH(3), CO, CO(2), and LPG gas. The resistivity change is different for UV and for H(2) gas sensing. The presented ZnO sensor proves to be promising for application in various processes. (c) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

    Journal Title

    Physica Status Solidi B-Basic Solid State Physics

    Volume

    247

    Issue/Number

    7

    Publication Date

    1-1-2010

    Document Type

    Article; Proceedings Paper

    Language

    English

    First Page

    1628

    Last Page

    1632

    WOS Identifier

    WOS:000280263700007

    ISSN

    0370-1972

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