Authors

Y. Li; Y. X. Yu; H. S. San; Y. S. Wang;L. A. An

Comments

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"This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in the linked citation and may be found originally at Applied Physics Letters."

Abbreviated Journal Title

Appl. Phys. Lett.

Keywords

HIGH-TEMPERATURE; PRESSURE SENSOR; SILICOALUMINUM CARBONITRIDE; HARSH; ENVIRONMENT; PIEZORESISTIVITY; FABRICATION; OXIDATION; RESIST; Physics, Applied

Abstract

This paper presents a passive wireless polymer-derived silicon carbonitride (SiCN) ceramic sensor based on cavity radio frequency resonator together with integrated slot antenna. The effect of the cavity sensor dimensions on the Q-factor and resonant frequency is investigated by numerical simulation. A sensor with optimal dimensions is designed and fabricated. It is demonstrated that the sensor signal can be wirelessly detected at distances up to 20 mm. Given the high-temperature stability of the SiCN, the sensor is very promising for high-temperature wireless sensing applications.

Journal Title

Applied Physics Letters

Volume

103

Issue/Number

16

Publication Date

1-1-2013

Document Type

Article

Language

English

First Page

5

WOS Identifier

WOS:000326148700088

ISSN

0003-6951

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