Title

Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators

Authors

Authors

H. T. Lin; L. Li; Y. Zou; S. Danto; J. D. Musgraves; K. Richardson; S. Kozacik; M. Murakowski; D. Prather; P. T. Lin; V. Singh; A. Agarwal; L. C. Kimerling;J. J. Hu

Comments

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Abbreviated Journal Title

Opt. Lett.

Keywords

PHOTONIC CRYSTAL CAVITIES; GE-SB-S; WAVE-GUIDES; PHOTOTHERMAL; SPECTROSCOPY; STRUCTURAL-PROPERTIES; FABRICATION; DESIGN; FILMS; Optics

Abstract

We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 x 10(5) at 5.2 mu m wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits. (C) 2013 Optical Society of America

Journal Title

Optics Letters

Volume

38

Issue/Number

9

Publication Date

1-1-2013

Document Type

Article

Language

English

First Page

1470

Last Page

1472

WOS Identifier

WOS:000318425600037

ISSN

0146-9592

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