Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators

    Authors

    H. T. Lin; L. Li; Y. Zou; S. Danto; J. D. Musgraves; K. Richardson; S. Kozacik; M. Murakowski; D. Prather; P. T. Lin; V. Singh; A. Agarwal; L. C. Kimerling;J. J. Hu

    Comments

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    Abbreviated Journal Title

    Opt. Lett.

    Keywords

    PHOTONIC CRYSTAL CAVITIES; GE-SB-S; WAVE-GUIDES; PHOTOTHERMAL; SPECTROSCOPY; STRUCTURAL-PROPERTIES; FABRICATION; DESIGN; FILMS; Optics

    Abstract

    We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 x 10(5) at 5.2 mu m wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits. (C) 2013 Optical Society of America

    Journal Title

    Optics Letters

    Volume

    38

    Issue/Number

    9

    Publication Date

    1-1-2013

    Document Type

    Article

    Language

    English

    First Page

    1470

    Last Page

    1472

    WOS Identifier

    WOS:000318425600037

    ISSN

    0146-9592

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