Fabrication of nano-scaled polymer-derived SiAlCN ceramic components using focused ion beam

    Authors

    Y. Tian; G. Shao; X. W. Wang;L. A. An

    Comments

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    Abbreviated Journal Title

    J. Micromech. Microeng.

    Keywords

    HIGH-TEMPERATURE; WATER-VAPOR; DEGREES-C; OXIDATION/CORROSION; PIEZORESISTIVITY; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics

    Abstract

    Fully dense polymer-derived amorphous silicoaluminum carbonitride (SiAlCN) ceramics were synthesized from polysilazane as preceramic precursors followed by a thermal decomposition process. The nanofabrication of amorphous SiAlCN ceramics was implemented with a focused ion beam (FIB). FIB conditions such as the milling rate, the beam current, and the number of passes were considered. It was found that nanopatterns with a feature size of less than 100 nm could be fabricated onto polymer-derived ceramics (PDCs) precisely and quickly. Specific nanostructures of thin walls, nozzle, and gear have been fabricated as demonstrations, indicating that the FIB technique was a promising method to realize nanostructures on PDCs, especially for microelectromechanical system and micro/nano-sensor applications.

    Journal Title

    Journal of Micromechanics and Microengineering

    Volume

    23

    Issue/Number

    9

    Publication Date

    1-1-2013

    Document Type

    Article

    Language

    English

    First Page

    6

    WOS Identifier

    WOS:000323814100036

    ISSN

    0960-1317

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