Fabrication of nano-scaled polymer-derived SiAlCN ceramic components using focused ion beam
Abbreviated Journal Title
J. Micromech. Microeng.
HIGH-TEMPERATURE; WATER-VAPOR; DEGREES-C; OXIDATION/CORROSION; PIEZORESISTIVITY; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics
Fully dense polymer-derived amorphous silicoaluminum carbonitride (SiAlCN) ceramics were synthesized from polysilazane as preceramic precursors followed by a thermal decomposition process. The nanofabrication of amorphous SiAlCN ceramics was implemented with a focused ion beam (FIB). FIB conditions such as the milling rate, the beam current, and the number of passes were considered. It was found that nanopatterns with a feature size of less than 100 nm could be fabricated onto polymer-derived ceramics (PDCs) precisely and quickly. Specific nanostructures of thin walls, nozzle, and gear have been fabricated as demonstrations, indicating that the FIB technique was a promising method to realize nanostructures on PDCs, especially for microelectromechanical system and micro/nano-sensor applications.
Journal of Micromechanics and Microengineering
"Fabrication of nano-scaled polymer-derived SiAlCN ceramic components using focused ion beam" (2013). Faculty Bibliography 2010s. 4757.