vfTLP-V-TH: A new method for quantifying the effectiveness of ESD protection for the CDM classification test

    Authors

    Y. Z. Zhou; D. Ellis; J. J. Hajjar; A. Olney;J. J. Liou

    Comments

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    Abbreviated Journal Title

    Microelectron. Reliab.

    Keywords

    MOSFET DEGRADATION; OXIDE; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

    Abstract

    A new methodology for quantifying the effectiveness of CDM protection circuits and CDM robustness of I/O circuits is presented in this paper. This method, referred to as the vfTLP-V-TH, consists of applying vfTLP stresses to test structures composed of the ESD protection and the device or circuit to be protected: a MOS device or a MOS inverter. The protected structures are used as monitors and shifts in their characteristics, such as MOS threshold voltage V-TH and saturation current I-DD, are used to probe device failure criteria. (C) 2012 Elsevier Ltd. All rights reserved.

    Journal Title

    Microelectronics Reliability

    Volume

    53

    Issue/Number

    2

    Publication Date

    1-1-2013

    Document Type

    Article

    Language

    English

    First Page

    196

    Last Page

    204

    WOS Identifier

    WOS:000315614600004

    ISSN

    0026-2714

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