Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications

    Authors

    H. T. Cheng; G. Shao; S. Ebadi; X. H. Ren; K. Harris; J. Liu; C. Y. Xu; L. N. An;X. Gong

    Comments

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    Abbreviated Journal Title

    Sens. Actuator A-Phys.

    Keywords

    Evanescent-mode resonator; Harsh environment; Integrated antenna; Polymer-Derived Ceramic; Pressure sensor; Wireless passive sensor; HIGH-TEMPERATURES; ELECTRONICS; FILTERS; SICN; Engineering, Electrical & Electronic; Instruments & Instrumentation

    Abstract

    A wireless pressure sensor for high-temperature applications is demonstrated based on a microwave evanescent-mode cavity resonator. Cavity deformation resulting from applied external pressure can be detected by measuring the resonant frequency change of the sensor. Compact sensor size is achieved by loading a cylindrical post inside the cavity resonator. In addition, a patch antenna is seamlessly integrated with the pressure sensor, without additional volume. This pressure sensor is able to survive high temperatures by adopting passive structures and robust ceramic/metallic materials. Fully-dense silicoaluminum carbonitride (SiAlCN) ceramic is used herein owing to its excellent thermal-mechanical properties and manufacturability as a Polymer-Derived Ceramic (PDC). A PDC soft-lithography technique is developed to fabricate the ceramic pressure sensor. In order to wirelessly interrogate the pressure sensor at high temperatures, a robust interrogation antenna is designed and fabricated with a wide fractional bandwidth. Finally, the cavity deformation of pressure sensor versus external pressure is measured at high temperatures up to 800 degrees C. The resonant frequency decreases from 11.75 to 11.56 GHz, when the applied external force on the sensor increases from 0 to 5 N at 800 degrees C. (C) 2014 Elsevier B.V. All rights reserved.

    Journal Title

    Sensors and Actuators a-Physical

    Volume

    220

    Publication Date

    1-1-2014

    Document Type

    Article

    Language

    English

    First Page

    22

    Last Page

    33

    WOS Identifier

    WOS:000346546800003

    ISSN

    0924-4247

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