Comparison of crystal orientation mapping-based and image-based measurement of grain size and grain size distribution in a thin aluminum film

    Authors

    X. Liu; A. P. Warren; N. T. Nuhfer; A. D. Rollett; K. R. Coffey;K. Barmak

    Comments

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    Abbreviated Journal Title

    Acta Mater.

    Keywords

    Transmission electron microscopy (TEM); Crystallographic orientation; Nanocrystalline aluminum; Grain size; Thin film; TRANSMISSION-ELECTRON-MICROSCOPE; BOUNDARY-CHARACTER-DISTRIBUTION; DIFFRACTION INTENSITIES; GROWTH; CONDUCTIVITY; COMPOSITES; Materials Science, Multidisciplinary; Metallurgy & Metallurgical; Engineering

    Abstract

    Crystal orientation maps of a nanocrystalline Al film were obtained using precession electron diffraction in a transmission electron microscope. The orientation maps were then subjected to a series of well-defined clean-up procedures for removal of badly indexed points and pseudosymmetry boundaries. The mean grain size and grain size distribution were obtained from the reconstructed boundary network. The grain size and grain size distribution were also measured by the conventional transmission electron microscopy brightfield-imaging-based hand-tracing methodology, and were compared quantitatively with the orientation mapping results. It was found that the mean grain size from the two methodologies agree within experimental error. On the other hand, the orientation mapping methodology produced a somewhat different grain size distribution compared with the distribution obtained by the hand-tracing methodology. The reasons for the differences in the distributions are discussed. (C) 2014 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

    Journal Title

    Acta Materialia

    Volume

    79

    Publication Date

    1-1-2014

    Document Type

    Article

    Language

    English

    First Page

    138

    Last Page

    145

    WOS Identifier

    WOS:000342718400014

    ISSN

    1359-6454

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