An Analytical Model for Conveyor-Based Material Handling System With Crossovers in Semiconductor Wafer Fabs

    Authors

    D. Nazzal; J. A. Jimenez; H. J. Carlo; A. L. Johnson;V. Lasrado

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Abbreviated Journal Title

    IEEE Trans. Semicond. Manuf.

    Keywords

    Analytical models; automated material handling system (AMHS); conveyors; wafer fabrication; FABRICATION FACILITY; DESIGN; PERFORMANCE; METHODOLOGY; DISCRETE; LAYOUT; Engineering, Manufacturing; Engineering, Electrical & Electronic; Physics, Applied; Physics, Condensed Matter

    Abstract

    This paper proposes a queueing-based analytical model useful in the design of closed-loop conveyor-based automated material handling system (AMHS), which has been identified as an effective material handling alternative in next-generation semiconductor wafer fabrication facilities. The model presented in this paper represents practical hardware considerations of the AMHS, such as turntables and crossovers. The objective is to accurately estimate the expected work-in-process (WIP) on the conveyor, queueing delays due to congestion at intersection points, as well as assessing the conveyor system stability. A four-phase approach is used to estimate the WIP. The proposed model is applied to the SEMATECH virtual 300mm wafer fab. Experimental results demonstrate that in the worst case where the maximum number of crossovers is used and the traffic on the conveyor is high, the analytical model performs very well with average relative errors of 4.2%.

    Journal Title

    Ieee Transactions on Semiconductor Manufacturing

    Volume

    23

    Issue/Number

    3

    Publication Date

    1-1-2010

    Document Type

    Article

    Language

    English

    First Page

    468

    Last Page

    476

    WOS Identifier

    WOS:000284167500013

    ISSN

    0894-6507

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